40" box MgF2 thermal evaporation
• IAD (Ion-Assist Deposition)
• Flipping planetary system
• 5-14" planets

48" box 2-4-pocket electron beam sources
• IAD
• Cammed flat plate rotation
• 4-15" substrate capability
• 8 material depositions possible

48" box 4-pocket electron beam sources
• IAD
• Cammed flat plate rotation
• 5-14" flipping planets
• 4 material depositions possible

36" box 4-pocket electron beam sources
• 3-12" planets
• 4 material depositions possible

Perkin Elmer Spectrophotometers for Coating Metrology